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Case Study: Measures to Prevent Deterioration of Centering Due to Plasma and Heat - Available for Free

Case Study: Measures to Prevent Deterioration of Centering Due to Plasma and Heat - Available for Free

Eliminate concerns about vacuum piping equipment! Presenting examples of measures against degradation of centering due to plasma and heat.

Here are some examples of product usage: - The fluorine rubber O-rings used for piping connections are deteriorating due to the effects of plasma and high-temperature exhaust from the plasma CVD equipment. - We are using expensive centering rings, but the costs are high and it is a concern. - The centering rings in the vacuum equipment are deteriorating and corroding, causing odors to leak out, which is problematic. Do you have any such concerns? KITZ SCT offers comprehensive solutions for flow path issues. If you have any specific cases you are interested in, please contact us via Ipros or our company website. Website: https://www.kitzsct.com/contact/product

  • Other semiconductor manufacturing equipment
  • valve
  • CVD Equipment

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Piping component centering ring

Piping component centering ring

Centering made of SUS304 and fluororubber as the basic materials.

The basic materials of the "Centering" are SUS304 and fluororubber. We also accept products with an inner side made of SUS316L, as well as O-rings made of NBR or silicone. 【Features】 ■ Inner side can also be SUS316L ■ O-rings can also be made of NBR or silicone ■ O-ring thickness is φ5 for NW10 to NW80, and φ5.33 for NW100 and above ■ Products for NW250 and above are also available For more details, please refer to the catalog or feel free to contact us.

  • Piping Materials

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